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Browsing by Author "Kaushik, V."

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    Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites

    Oechsner, Richard
    ;
    Pfeffer, M.
    ;
    Frickinger, J.
    ;
    Schellenberger, M.
    ;
    Roeder, G.
    ;
    Pfitzner, L.
    Journal article
    2007, IEEE Trans. Semiconductor Manufacturing, (20) 3, p.215-221
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    Compatibility of polysilicon with HfO2-based gate dielectrics for CMOS applications

    Kaushik, V.
    ;
    De Gendt, Stefan  
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    Caymax, Matty  
    ;
    Young, E.
    ;
    Röhr, Erika
    ;
    Van Elshocht, Sven  
    Proceedings paper
    2003, ULSI Process Integration III, 28/04/2003, p.391-396

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