Browsing by Author "Kaushik, V."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites
;Oechsner, Richard ;Pfeffer, M. ;Frickinger, J. ;Schellenberger, M. ;Roeder, G.Pfitzner, L.Journal article2007, IEEE Trans. Semiconductor Manufacturing, (20) 3, p.215-221Publication Compatibility of polysilicon with HfO2-based gate dielectrics for CMOS applications
Proceedings paper2003, ULSI Process Integration III, 28/04/2003, p.391-396