Publication:
Compatibility of polysilicon with HfO2-based gate dielectrics for CMOS applications
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
2061 since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations
Metrics
Views
2061 since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations