Browsing by Author "Keldermans, Johan"
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Publication Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Proceedings paper2007-11, International Symposium on Dry Process, 13/11/2007, p.37-38Publication Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Journal article2008, Japanese Journal of Applied Physics, (47) 8, p.6870-6874