Browsing by Author "Kelkar, Prasad"
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Publication Novel process to pattern selectively dual dielectric capping layers using soft-mask only
Proceedings paper2008, Symposium on VLSI Technology Digest of Technical Papers, 17/06/2008, p.44-45Publication Single-metal dual-dielectric (SMDD) gate-first CMOS integration towards low VT and high performance
Proceedings paper2009, Internationa l Symposium on VLSI Technology, systems and Applications - VLSI-TSA, 27/04/2009, p.49-50