Browsing by Author "Kemeling, Nathan"
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Publication Characterization and optimization of porogen based PECVD deposited extreme low-k materials as a function of UV-cure time
Journal article2007, Surface and Coatings Technology, (201) 22_23, p.9264-9268Publication Highly reliable Cu/ULK integratrion scheme using MHM and low-k capping film
Oral presentation2007, Advanced Metallization Conference - AMC