Browsing by Author "Kerr, Emma"
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Publication Grain growth in electroplated copper
Oral presentation2001, MRS Spring Meeting. Symposium L: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; AprilPublication Grain growth, stress, and impurities in electroplated copper
Journal article2002, Journal of Materials Research, (17) 3, p.582-589Publication Grain structure evolution during annealing of electroplated copper
Proceedings paper2002, Stress-Induced Phenomena in Metallization: 6th International Workshop, 25/07/2001, p.229-234Publication Limitations to copper grain growth in narrow trenches
Proceedings paper2001, Proceedings of the IEEE 2001 International Interconnect Technology Conference, 4/06/2001, p.230-232Publication Stress and impurities in electroplated copper
Proceedings paper2001, Advanced Metallization Conference 2000, 3/10/2000, p.161-165