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Limitations to copper grain growth in narrow trenches
Publication:
Limitations to copper grain growth in narrow trenches
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brongersma, Sywert
;
Kerr, Emma
;
Vervoort, Iwan
;
Maex, Karen
Journal
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1945
since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations
Metrics
Views
1945
since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations