Browsing by Author "Kilpela, Olli"
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Publication Characterization of TiN films deposited by atomic layer deposition
Proceedings paper2002, Proceedings of the 3rd AVS International Conference on Microelectronics and Interfaces, 11/02/2002, p.56-58Publication Development of sub-10-nm atomic layer deposition barriers for Cu/low-k interconnects
Journal article2002, Microelectronic Engineering, (64) 1_4, p.233-245Publication Impact of ALCVD and PVD titanium nitride deposition on metal gate capacitors
Proceedings paper2002, ESSDERC - 32nd European Solid-State Device Research Conference, 24/09/2002, p.583-586Publication Nucleation and growth of TiN films deposited by atomic layer deposition
Proceedings paper2002, Proceedings of the 3rd AVS International Conference on Microelectronics and Interfaces, 11/02/2002, p.52-54