Browsing by Author "Kim, Byeong Soo"
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Publication EUV resist process development for full field imaging
Oral presentation2007, International EUVL SymposiumPublication Imaging performance of the EUV alpha demo tool at IMEC
Proceedings paper2008, Emerging Lithographic Technologies XII, 24/02/2008, p.69210OPublication Progress in full field EUV lithography program at IMEC
Proceedings paper2007, International EUVL Sympsoium, 28/10/2007Publication Screening of second-generation high-index liquids
Proceedings paper2007, Advances in Resist Materials and Processing Technology XXIV, 25/02/2007, p.65190A