Browsing by Author "Kim, Kyung Hyun"
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Publication Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solvents
Journal article2009, Journal of Adhesion Science and Technology, (23) 12, p.1709-1721Publication Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions
; ; ; ; ; Proceedings paper2008, 7th International Semiconductor Technology Conference - ISTC, 15/03/2008, p.436-446