Browsing by Author "Kimerling, L. C."

Now showing 1 - 3 of 3

Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements

Norga, Gerd
;
Platero, M.
;
Black, K. A.
;
Reddy, A. J.
;
Michel, J.
;
Kimerling, L. C.
Journal article
1998, J. Electrochem. Soc., (145) 7, p.2602-2607
Mechanism of copper deposition on silicon from dilute hydrofluoric acid solution

Norga, Gerd
;
Platero, M.
;
Black, K. A.
;
Reddy, A. J.
;
Michel, J.
;
Kimerling, L. C.
Journal article
1997, J. Electrochem. Soc., (144) 8, p.2801-2810
Silicon surface defects: the roles of passivation and surface contamination

Reddy, A. J.
;
Burr, T. A.
;
Chan, Julia K.
;
Norga, Gerd
;
Michel, J.
;
Kimerling, L. C.
Proceedings paper
1997, Defects in Semiconductors 19 - ICDS 19, 21/07/1997, p.1719-1724