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Mechanism of copper deposition on silicon from dilute hydrofluoric acid solution
Publication:
Mechanism of copper deposition on silicon from dilute hydrofluoric acid solution
Date
1997
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Norga, Gerd
;
Platero, M.
;
Black, K. A.
;
Reddy, A. J.
;
Michel, J.
;
Kimerling, L. C.
Journal
J. Electrochem. Soc.
Abstract
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1885
since deposited on 2021-09-30
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Acq. date: 2025-10-25
Citations
Metrics
Views
1885
since deposited on 2021-09-30
423
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations