Browsing by Author "Kimura, Shigeru"

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Interface and defect control for group IV channel engineering

Sakai, Akira
;
Ohara, Yuji
;
Ueda, Takaya
;
Toyoda, Eiji
;
Izunome, Koji
;
Takeuchi, Shotaro
Proceedings paper
2008, SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices, 12/10/2008, p.687-698
Interface and defect control for group IV channel engineering

Sakai, Akira
;
Ohara, Yuji
;
Ueda, Takaya
;
Toyoda, Eiji
;
Izunome, Koji
;
Takeuchi, Shotaro
Meeting abstract
2008, 214th ECS Meeting, 12/10/2008, p.2450
Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers by nanobeam X-ray diffraction

Shida, Kazuki
;
Takeuchi, Shotaro
;
Imai, Yasuhiko
;
Kimura, Shigeru
;
Schulze, Andreas
Journal article
2017, ACS Applied Materials & Interfaces, (9) 15, p.13726-13732
X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafers

Loo, Roger
;
Shimura, Yosuke
;
Sun, Jianwu
;
Ike, Shinichi
;
Inuzuka, Yuuki
;
Nakatsuka, Osau
Book
2015