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X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafers
Publication:
X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafers
Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Shimura, Yosuke
;
Sun, Jianwu
;
Ike, Shinichi
;
Inuzuka, Yuuki
;
Nakatsuka, Osau
;
Zaima, Shigeaki
;
Imai, Yasuhiko
;
Kimura, Shigeru
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2084
since deposited on 2021-10-22
Acq. date: 2025-10-26
Citations
Metrics
Views
2084
since deposited on 2021-10-22
Acq. date: 2025-10-26
Citations