Browsing by Author "Kjaer, Daniel"

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Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch H.
;
Hansen, Ole
;
Hansen, Torben M.
;
Boggild, Peter
;
Lin, Rong
;
Kjaer, Daniel
Proceedings paper
2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009
Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Petersen, Dirch
;
Hansen, Ole
;
Hansen, Torben
;
Boggild, Peter
;
Lin, Rong
;
Kjaer, Daniel
Journal article
2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C27-C1C33