Browsing by Author "Knops, Roel"
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Publication Alternative EUV mask technology for mask 3D effect compensation
Proceedings paper2014, International Symposium on Extreme Ultraviolet Lithography - EUVL, 27/10/2014Publication Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250K