Browsing by Author "Kocaay, Deniz"
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Publication Current understanding of BEOL TDDB lifetime models
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 1, p.N3094-N3097Publication Effect of line-overlay and via-misalignment on dielectric reliability for different patterning schemes
Proceedings paper2014, IEEE International Reliability Physics Symposium - IRPS, 1/06/2014Publication Impact of litho-patterning variations on the electrical performance and variability of advanced interconnects
Proceedings paper2018, 25th Lithography Workshop, 17/06/2018, p.18Publication Impact of process variability on BEOL TDDB lifetime model assessment
Proceedings paper2015, IEEE International Reliability Physics Symposium - IRPS, 19/04/2015, p.BD.5Publication Interconnect metals beyond copper: reliability challenges and opportunities
Proceedings paper2018, IEEE International Electron Devices Meeting - IEDM, 1/12/2018, p.111-114Publication LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration
Journal article2017, Microelectronics Reliability, 76-77, p.131-135Publication Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing
Proceedings paper2018, IEEE International Reliability Physics Symposium - IRPS, 11/03/2018, p.P-GD.10-1-P-GD.10-4Publication Reliability mechanisms and lifetime extrapolation methods for scaled interconnect technologies
Proceedings paper2015, IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM, 18/05/2015, p.295-298