Publication:
LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration
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1988 since deposited on 2021-10-24
3last month
Acq. date: 2026-08-20
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Statistics
Views
1988 since deposited on 2021-10-24
3last month
Acq. date: 2026-08-20
Citations