Publication:
LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration
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1984 since deposited on 2021-10-24
5last month
Acq. date: 2026-01-11
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Metrics
Views
1984 since deposited on 2021-10-24
5last month
Acq. date: 2026-01-11
Citations