Publication:
LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration
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1985 since deposited on 2021-10-24
1last week
Acq. date: 2026-02-26
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Statistics
Views
1985 since deposited on 2021-10-24
1last week
Acq. date: 2026-02-26
Citations