Publication:

LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration

Date

2017
Journal article
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dc.contributor.authorKocaay, Deniz
dc.contributor.authorRoussel, Philippe
dc.contributor.authorCroes, Kristof
dc.contributor.authorCiofi, Ivan
dc.contributor.authorSaad, Yves
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-24T07:03:43Z
dc.date.available2021-10-24T07:03:43Z
dc.date.issued2017
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28699
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S002627141730241X?via%3Dihub
dc.source.beginpage131
dc.source.endpage135
dc.source.journalMicroelectronics Reliability
dc.source.volume76-77
dc.title

LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration

dc.typeJournal article
dspace.entity.typePublication
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