Browsing by Author "Koike, Junichi"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
Journal article2012, Japanese Journal of Applied Physics, (51) 5, p.05EB01Publication Characterization of CVD-Mn barrier layers using X-ray absorption fine structure
Oral presentation2011, Advanced Metallization Conference - ADMETAPublication Effects of plasma surface treatment on the self-forming barrier process in porous SiOCH
Proceedings paper2008, Materials and Processes for Advanced Interconnects for Microelectronics, 24/03/2008, p.N03.10