Browsing by Author "Kosugi, Hitoshi"
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Publication EUV process sensitivities and optimizations for track processing
Proceedings paper2010, International Symposium on Extreme Ultraviolet Lithography, 18/10/2010Publication EUV processing investigation on state-of-the-art coater/developer system
Proceedings paper2011, Extreme Ultravoiolet (EUV) Lithography II, 27/02/2011, p.796937Publication Track processing optimizations for different EUV resist platforms: preparing for a 3300 baseline process
Proceedings paper2013, Extreme Ultraviolet (EUV) Lithography IV, 24/02/2013, p.86792T