Publication:

EUV processing investigation on state-of-the-art coater/developer system

Date

2011

Proceedings Paper

Simple item page Full metadata Statistics

Files

22439.pdf 2.23 MB

Author(s)

;

;

;

;

Nafus, Kathleen

;

Kosugi, Hitoshi

;

Foubert, Philippe

;

;

Hendrickx, Eric

;

Goethals, Mieke

;

;

Jehoul, Christiane

Statistics

1947 since deposited on 2021-10-19

2last month

Acq. date: 2026-06-02