Browsing by Author "Kotai, E."

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Formation of epitaxial CoSi2 film on Si1-xGex(100) by reactive deposition epitaxy of Co1-xTix layer

Peto, G.
;
Molnar, G.
;
Kotai, E.
;
Dezsi, I.
;
Karlsteen, M.
;
Södervall, U.
;
Willander, M.
;
Caymax, Matty
Oral presentation
2001, Symposium D of the E-MRS Spring Meeting 2001: 2nd International Conference on Silicon Epitaxy and Heterostructures; June 5-8, 20
Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxy

Peto, G.
;
Molnar, G.
;
Kotai, E.
;
Dezsi, I.
;
Karsteen, M.
;
Sodervall, U.
;
Willander, M.
;
Caymax, Matty
Journal article
2002, Applied Physics Letters, (81) 1, p.37-39