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Formation of epitaxial CoSi2 film on Si1-xGex(100) by reactive deposition epitaxy of Co1-xTix layer
Publication:
Formation of epitaxial CoSi2 film on Si1-xGex(100) by reactive deposition epitaxy of Co1-xTix layer
Date
2001
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Peto, G.
;
Molnar, G.
;
Kotai, E.
;
Dezsi, I.
;
Karlsteen, M.
;
Södervall, U.
;
Willander, M.
;
Caymax, Matty
;
Loo, Roger
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1959
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1959
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations