Publication:
Formation of epitaxial CoSi2 film on Si1-xGex(100) by reactive deposition epitaxy of Co1-xTix layer
Date
| dc.contributor.author | Peto, G. | |
| dc.contributor.author | Molnar, G. | |
| dc.contributor.author | Kotai, E. | |
| dc.contributor.author | Dezsi, I. | |
| dc.contributor.author | Karlsteen, M. | |
| dc.contributor.author | Södervall, U. | |
| dc.contributor.author | Willander, M. | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-14T17:34:42Z | |
| dc.date.available | 2021-10-14T17:34:42Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5568 | |
| dc.source.conference | Symposium D of the E-MRS Spring Meeting 2001: 2nd International Conference on Silicon Epitaxy and Heterostructures; June 5-8, 20 | |
| dc.source.conferencelocation | ||
| dc.title | Formation of epitaxial CoSi2 film on Si1-xGex(100) by reactive deposition epitaxy of Co1-xTix layer | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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