Browsing by Author "Koumoto, T."
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Publication In-line and non-destructive analysis of epitaxial Si1-x-yGexCy
Journal article2004, Yield Management Solutions, (6) 2, p.40-47Publication In-line and non-destructive analysis of epitaxial Si1-x-yGexCy by spectroscopic ellipsometry and comparison with other established techniques
Proceedings paper2003, Analytical and Diagnostic Techniques for Semiconductor Materials and Processes, 27/04/2003, p.329-338