Browsing by Author "Kovalev, A."

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Effect of VUV and EUV radiation on utra low-k materials damage

Braginsky, O.
;
Kovalev, A.
;
Lopaev, D.
;
Mankelevich, Y.
;
Proshina, O.
;
Rakhimova, T.
;
Rakhimov, A.
Proceedings paper
2013, Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability, 1/04/2013, p.AA03.11
Modification of OSG based low-k films under EUV and VUV exposure

Rakhimova, T.
;
Rakhimov, A.
;
Mankelevich, Y.
;
Lopaev, D.
;
Kovalev, A.
;
Vasil'eva, A.
;
Proshina, O.
Journal article
2013, Applied Physics Letters, 102, p.111902