Browsing by Author "Kraus, P.A."
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Publication Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS
Publication Study of pulsed RF DPN process parameters for 65 nm node MOSFET gate dielectrics
Proceedings paper2004, Integration of Advanced Micro- and Nanoelectronic Devices - Critical Issues and Solutions, 10/04/2004, p.49-53