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Study of pulsed RF DPN process parameters for 65 nm node MOSFET gate dielectrics
Publication:
Study of pulsed RF DPN process parameters for 65 nm node MOSFET gate dielectrics
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rothschild, Aude
;
Kraus, P.A.
;
Chua, T.C.
;
Nouri, F.
;
Cubaynes, Florence
;
Veloso, Anabela
;
Mertens, Sofie
;
Date, Lucien
;
Schreutelkamp, Rob
;
Schaekers, Marc
Journal
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1976
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1976
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations