Browsing by Author "Kremer, Stephanie"
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Publication In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Oral presentation2001, KLA-Tencor Yield Management Seminar (YMS); April 25 2001; München, Germany.Publication In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Proceedings paper2001, In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II; 1 June 2001; Edinburgh,Publication Optimization of scatterometry parameters for shallow trench isolation (STI) monitor
Proceedings paper2004, Metrology, Inspection, and Process Control for Microlithography XVIII, 22/02/2004, p.576-586