Browsing by Author "Krivoshapkina, Yana"

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High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology

Lenk, Claudia
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Krivoshapkina, Yana
;
Hofmann, Martin
;
Lenk, Steve
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Tzvetan, Ivanov
;
Rangelow, Ivo
Journal article
2019, Journal of Vacuum Science and Technology B, (37) 2, p.21603
Molecular glass resists for scanning probe lithography

Neuber, Christian
;
Ringk, Andreas
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Kolb, Tristan
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Wieberger, Floryan
;
Strohriegl, Peter
Proceedings paper
2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90491V