Browsing by Author "Kronmüller, S."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication New low-stress PECVD Poly-SiGe layers for MEMS
Journal article2003, Journal of Microelectromechanical Systems, (12) 6, p.816-825Publication Processing of MEMS gyroscopes on top of CMOS ICs
Proceedings paper2005-02, Proceedings International Solid-State Circuits Conference - ISSCC, 6/02/2005, p.88-89