Publication:

Processing of MEMS gyroscopes on top of CMOS ICs

Date

2005-02
Proceedings Paper
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Author(s)

Witvrouw, Ann
;
Mehta, Anshu
;
Verbist, Agnes
;
Du Bois, Bert  
;
Van Aerde, Steven  
;
Ramos-Martos, J.
;
Ceballos, J.
;
Ragel, A.
;
Mora, J.M.
;
Lagos, M.A.
;
Arias, A.
;
Hinojosa, J.M.
;
Spengler, J.
;
Leinenbach, C.
;
Fuchs, T.
;
Kronmüller, S.

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1966 since deposited on 2021-10-16
Acq. date: 2026-03-16

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1966 since deposited on 2021-10-16
Acq. date: 2026-03-16

Citations