Publication:

Processing of MEMS gyroscopes on top of CMOS ICs

Date

2005-02
Proceedings Paper
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dc.contributor.authorWitvrouw, Ann
dc.contributor.authorMehta, Anshu
dc.contributor.authorVerbist, Agnes
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVan Aerde, Steven
dc.contributor.authorRamos-Martos, J.
dc.contributor.authorCeballos, J.
dc.contributor.authorRagel, A.
dc.contributor.authorMora, J.M.
dc.contributor.authorLagos, M.A.
dc.contributor.authorArias, A.
dc.contributor.authorHinojosa, J.M.
dc.contributor.authorSpengler, J.
dc.contributor.authorLeinenbach, C.
dc.contributor.authorFuchs, T.
dc.contributor.authorKronmüller, S.
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorVan Aerde, Steven
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.date.accessioned2021-10-16T07:13:18Z
dc.date.available2021-10-16T07:13:18Z
dc.date.issued2005-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11568
dc.source.beginpage88
dc.source.conferenceProceedings International Solid-State Circuits Conference - ISSCC
dc.source.conferencedate6/02/2005
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage89
dc.title

Processing of MEMS gyroscopes on top of CMOS ICs

dc.typeProceedings paper
dspace.entity.typePublication
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