Browsing by Author "Kruemberg, Jens"
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Publication Optimization of EUV reticle cleaning by evaluation of chemistries on wafer-based mimic test structures.
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.357Publication Single element and metal alloy novel EUV mask absorbers for improved imaging
Proceedings paper2017, International Conference on Extreme Ultraviolet Lithpgraphy - EUVL, 11/09/2017, p.104500G