Publication:

Single element and metal alloy novel EUV mask absorbers for improved imaging

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Philipsen, Vicky

;

;

Souriau, Laurent

;

Altamirano Sanchez, Efrain

;

Adelmann, Christoph

;

Hendrickx, Eric

;

;

Laubis, Christian

;

Kruemberg, Jens

;

Reuter, Christian

Metrics

1911 since deposited on 2021-10-24

1last month

Acq. date: 2026-01-06