Publication:

Single element and metal alloy novel EUV mask absorbers for improved imaging

Date

2017

Proceedings Paper

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Author(s)

Philipsen, Vicky

;

;

Souriau, Laurent

;

Altamirano Sanchez, Efrain

;

Adelmann, Christoph

;

Hendrickx, Eric

;

;

Laubis, Christian

;

Kruemberg, Jens

;

Reuter, Christian

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Acq. date: 2026-04-27