Browsing by Author "Krumrey, M."
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Publication Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation
; Proceedings paper2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.293-300Publication Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.1975