Browsing by Author "Kuppuswamy, Vijaya-Kumar Murugesan"

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Contact edge roughness and CD uniformity in EUV: effect of photo acid generator and sensitizer

Kuppuswamy, Vijaya-Kumar Murugesan
;
Constantoudis, Vassilios
;
Gogolides, Evangelos
Proceedings paper
2012, Extreme Ultraviolet (EUV) Lithography III, 12/02/2012, p.832207
Contact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformity

Kuppuswamy, Vijaya-Kumar Murugesan
;
Constantoudis, Vassilios
;
Gogolides, Evangelos
Proceedings paper
2011, Metrology, Inspection, and Process Control XXV, 27/02/2011, p.79710Q