Browsing by Author "Kushibiki, Masato"
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Publication Etching of Co-Pd with significantly reduced sidewall re-deposition
Meeting abstract2013, 35th International Symposium on Dry Process, 29/08/2013, p.D-4Publication LWR reduction by novel lithographic and etch techniques
Proceedings paper2010, Advances in Resist Materials and Processing Technology XXVII, 21/02/2010, p.763914