LWR reduction by novel lithographic and etch techniques

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Author(s)

Kobayashi, Shinji

;

Shimura, Satoru

;

Kawasaki, Tetsu

;

Nafus, Kathleen

;

Hatakeyama, Shinichi

;

;

Nishimura, Eiichi

;

Kushibiki, Masato

;

;

;

Vaglio Pret, Alessandro

;

Kitano, Junichi

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2031 since deposited on 2021-10-18

Acq. date: 2025-10-23