Browsing by Author "Kwakman, Laurens"
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Publication Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices
Publication Statistical significance of STEM based metrology on advanced 3D transistor structures
Proceedings paper2019, Metrology, Inspection, and Process Control for Microlithography XXXIII, 24/02/2019, p.109590CPublication Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nano-electronic devices
Journal article2015, Semiconductor Science and Technology, (30) 11, p.114015Publication Surface redeposition and damage due to focused ion beam milling
Oral presentation2015, ESREF European FIB Users Group Workshop - EFUB