Browsing by Author "Kwinten, Hans"

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Lithographic importance of acid diffusion in chemically amplified resists

Van Steenwinckel, David
;
Lammers, Jeroen
;
Leunissen, Peter
;
Kwinten, Hans
Proceedings paper
2005, Advances in Resist Technology and Processing XXII, 28/02/2005, p.269-280
Overbake: sub-40-nm gate patterning with ArF lithography and binary masks

Van Steenwinckel, David
;
Kwinten, Hans
;
Locorotondo, Sabrina
;
Beckx, Stephan
Proceedings paper
2004, Advances in Resist Technology and Processing XXI, p.215-225