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Browsing by Author "Lammers, J.H."

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    A novel method for characterizing resist performance

    Van Steenwinckel, David
    ;
    Gronheid, Roel  
    ;
    Lammers, J.H.
    ;
    Myers, Alan
    ;
    Van Roey, Frieda  
    Proceedings paper
    2007, Advances in Resist Materials and Processing Technology XXIV, 25/02/2007, p.65190V
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    Resolution, line width roughness and sensitivity in advanced photoresists

    Van Steenwinckel, David
    ;
    Gronheid, Roel  
    ;
    Lammers, J.H.
    Journal article
    2008, Future Fab International, 26, p.65-72

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