imec Institutional Repository Browsing {{ collection }} by Author "Lauria, John"

Publication

11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

Witvrouw, Ann

;

Haspeslagh, Luc

;

Varela Pedreira, Olalla

;

De Coster, Jeroen

;

De Wolf, Ingrid

Journal article

2010, Journal of Microelectromechanical Systems, (19) 1, p.202-214

Publication

Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays

Witvrouw, Ann

;

Tilmans, Harrie

;

Bogaerts, Lieve

;

De Moor, Piet

;

Bearda, Twan

;

Halder, Sandip

Proceedings paper

2009, 22nd International IEEE Conference on Micro Electro Mechanical Systems - MEMS, 25/01/2009, p.136-139

Publication

SLM device for 193 nm lithographic applications

Lauria, John

;

Albright, Ronald

;

Vladimirsky, Olga

;

Chen, Luoqi

;

Hoeks, Maarten

;

Vanneer, Roel

Meeting abstract

2008, MNE, 15/09/2008

Publication

SLM device for 193 nm lithographic applications

Lauria, John

;

Albright, R.

;

Vladimirsky, O.

;

Hoeks, M.

;

Vanneer, R.

;

van Drieenhuizen, B.

;

Chen, L.

Journal article

2009, Microelectronic Engineering, (86) 4_6, p.569-572

Browsing by Author "Lauria, John"