Browsing by Author "Lavoie, Christian"
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Publication Kinetics of Ni3Si2 formation in the Ni2Si-NiSi thin film reaction from in situ measurements
Journal article2007, Applied Physics Letters, (91) 23, p.232102Publication Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates
Publication Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully-silicided gate applications
Journal article2007, Applied Physics Letters, (91) 17, p.172108