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Browsing by Author "Lee, W. T."

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    300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition

    Clerix, Jan-Willem  
    ;
    Warad, L.
    ;
    Hung, J.
    ;
    Hody, Hubert  
    ;
    Van Roey, Frieda  
    ;
    Lorusso, Gian  
    ;
    Koret, R.
    Journal article
    2023, APPLIED SURFACE SCIENCE, (626) July, p.Art. 157222

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