Browsing by Author "Lee, W. T."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication 300 mm-wafer metrology for area-selective deposition in nanoscale patterns: A case study for ruthenium atomic layer deposition
; ; ; ; Koret, R.Journal article2023, APPLIED SURFACE SCIENCE, (626) July, p.Art. 157222Publication Wafer-scale characterization for two-dimensional material layers
Journal article review2024-MAR 1, JAPANESE JOURNAL OF APPLIED PHYSICS, (63) 3, p.030802