Browsing by Author "Li, Fahong"
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Publication 3D features measurement using YieldStar, an angle resolved polarized scatterometer
Proceedings paper2011, Metrology, Inspection, and Process Control XXV, 27/02/2011, p.79712EPublication 3D features measurement using Yieldstar, an angle resolved polarized scatterometer
Proceedings paper2011, Optical Fabrication, Testing and Metrology IV, 5/09/2011, p.8160QPublication Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129550O