imec Institutional Repository Browsing {{ collection }} by Author "Li, Wei-Min"

Publication

Materials characterization of WNxCy, WNx and WCx films for advanced barriers

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Brijs, Bert

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Carbonell, Laure

Journal article

2007, Microelectronic Engineering, (84) 11, p.2441-2465

Publication

Opportunities and challenges for integration of ALD barrier layers in damascene process flows

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Schuhmacher, Jorg

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Travaly, Youssef

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Sutcliffe, Victor

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Abell, Thomas

Proceedings paper

2004, Atomic Layer Deposition Conference, 16/08/2004

Publication

Thin film characterization of PEALD Ru layers on an ALD WNC substrate

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Sinapi, Fabrice

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Benedetti, Alessandro

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Brijs, Bert

Proceedings paper

2007, Advanced Metallization Conference 2006 - AMC 2006, 17/10/2006, p.227-232

Browsing by Author "Li, Wei-Min"