Browsing by Author "Liang, Andrew"

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Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures

Blachut, Gregory
;
Sirard, Stephen
;
Liang, Andrew
;
Mack, Chris
;
Maher, Michael
Proceedings paper
2018, Advanced Etch Technology for Nanopatterning VII, 25/02/2018, p.1058907
Integrated approach to improving local CD uniformity in EUV patterning

Liang, Andrew
;
Hermans, Jan
;
Tran, Tim
;
Viatkina, Katja
;
Liang, Chen-Wei
;
Ward, Brandon
Proceedings paper
2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.1014319