Browsing by Author "Lin, G."
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Publication Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.94230MPublication Implementation of templated DSA for via layer patterning at the 7 nm node
Proceedings paper2015, Alternative Lithographic Technologies VII, 23/02/2015, p.942305